A Miniaturized Helium Photoionization Detector

This is a technique to miniaturize a Helium Photo-ionization Detector using silicon micromachining resulting in a dimension less that 2cm x 1cm x 2mm. This is suitable for universal, sensitive yet non-destructive gas sensing. Unlike its universal counterpart, the Thermal Conductivity Detector, this consumes less power (just 1.4mW) and is more stable to ambient temperature, making it well-suited for portable systems.
Patent Information:
App Type Country Serial No. Patent No. File Date Issued Date Patent Status
US Utility *United States 14/529,760 10,048,222 10/31/2014 8/14/2018 Issued
For Information, Contact:
Rozzy Finn
Licensing Officer
Virginia Tech Intellectual Properties, Inc.
Rozzy@vt.edu
Inventors:
Shree Narayanan Sreedharan Nair
Masoud Agah
Keywords: