A Miniaturized Helium Photoionization Detector

Description:

This is a technique to miniaturize a Helium Photo-ionization Detector using silicon micromachining resulting in a dimension less that 2cm x 1cm x 2mm. This is suitable for universal, sensitive yet non-destructive gas sensing. Unlike its universal counterpart, the Thermal Conductivity Detector, this consumes less power (just 1.4mW) and is more stable to ambient temperature, making it well-suited for portable systems.

Patent Information: